Metrology

The aim of this handbook is to provide a comprehensive summary of sensing and measurement in precision manufacturing, which is essential for process and quality control. The importance of precision sensing and measurements lies not only in the ability to distinguish whether the manufactured part meets the assigned tolerances through inspection but also, in many cases, reduce the deviation of the manufactured part from the designed values through improvement of the process or compensation manufacturing based on the sensing and measurement results. The information provided in the book will be of interest to industrial practitioners and researchers in the field of precision manufacturing sensing and measurements.

Process Sensing Technologies for Precision Manufacturing Process Control.- Precision Sensors for Length and Angle.- Measuring Instruments for Surface Forms.- Surface Finish Measuring Machines.- Large-Scale Measurement.- Microstructure Measurement.- Nano-Metrology.- Error Motion Measurement of Precision Machines.- Thermal Measurement and Compensation.- In-Process and On-Machine Measurement.- Inspection of Internal Defects using industrial NDT methods.

Wei Gao received his Bachelor of Precision Instrumentation from Shanghai Jiao Tong University, China, in 1986, followed by MSc and Ph. D from Tohoku University, Japan, in 1991 and 1994, respectively. He is currently a professor and the director of Research Center for Precision Nanosystems, Department of Nanomechanics of Tohoku University. His research interests include precision metrology and micro/nano-metrology. He is a fellow of the International Academy for Production Engineering (CIRP), the International Society for Nanomanufacturing (ISNM), and The Japan Society for Precision Engineering (JSPE). He serves as the Vice-Chairman of The Scientific Technical Committee Precision Engineering and Metrology of CIRP. He is also a Vice President of JSPE in 2015. He works or has worked in the editorial board of several international journals including Precision Engineering, IEEE Transactions on Instrumentation & Measurement, International Journal for Precision Engineering and Manufacturing.He has published more than 150 journal papers and applied more than 50 patents (more than 20 issued). He is the author of the book “Precision Nanometrology” (Springer) and has won five Paper Awards from JSPE.