MEMS Fundamental Technology and Applications

The microelectromechanical systems (MEMS) industry has experienced explosive growth over the last decade. Applications range from accelerometers and gyroscopes used in automotive safety to high-precision on-chip integrated oscillators for reference generation and mobile phones. MEMS: Fundamental Technology and Applications brings together groundbreaking research in MEMS technology and explores an eclectic set of novel applications enabled by the technology. The book features contributions by top experts from industry and academia from around the world. The contributors explain the theoretical background and supply practical insights on applying the technology. From the historical evolution of nano micro systems to recent trends, they delve into topics including: Thin-film integrated passives as an alternative to discrete passives The possibility of piezoelectric MEMS Solutions for MEMS gyroscopes Advanced interconnect technologies Ambient energy harvesting Bulk acoustic wave resonators Ultrasonic receiver arrays using MEMS sensors Optical MEMS-based spectrometers The integration of MEMS resonators with conventional circuitry A wearable inertial and magnetic MEMS sensor assembly to estimate rigid body movement patterns Wireless microactuators to enable implantable MEMS devices for drug delivery MEMS technologies for tactile sensing and actuation in robotics MEMS-based micro hot-plate devices Inertial measurement units with integrated wireless circuitry to enable convenient, continuous monitoring Sensors using passive acousto-electric devices in wired and wireless systems Throughout, the contributors identify challenges and pose questions that need to be resolved, paving the way for new applications. Offering a wide view of the MEMS landscape, this is an invaluable resource for anyone working to develop and commercialize MEMS applications.

Breakthrough TechnologyMicrosystems to Nano-Microsystems: A Technological BreakthroughHauden DanielHfO2-Based High-? Dielectrics for Use in MEMS ApplicationsBing Miao, Rajat Mahapatra, Nick Wright, and Alton HorsfallPiezoelectric Thin Films for MEMS ApplicationsIsaku KannoCMOS Systems and Interfaces for sub-deg/hr MicrogyroscopesAjit Sharma, Mohammad Faisal Zaman, and Farrokh AyaziBulk Acoustic Wave GyroscopesHouri JohariMechanically Flexible Interconnects and TSVs: Applications in CMOS/MEMS IntegrationHyung Suk Yang, Paragkumar Thadesar, Chaoqi Zhang, and Muhannad BakirModeling of Piezoelectric MEMS Vibration Energy HarvestersMarcin Marzencki and Skandar BasrourInterface Circuits for Capacitive MEMS GyroscopesHongzhi Sun and Huikai XieElectromechanical Loops for High-Performance and Robust Gyroscope System DesignVikas Choudhary, Abhinav Dikshit, Anjan Kumar, Deva Phanindra Kumar, Saravanan Kamatchi, and Nemai BiswasMEMS-Based Novel ApplicationsBulk Acoustic Wave Resonators for Mobile Communication SystemsSumy JoseWideband Ultrasonic Transmitter and Sensor Array for In-Air ApplicationsJ.R. Gonzalez, Mohamed Saad, and Chris J. BleakleyMEMS-Based Lamellar Grating Fourier Transform SpectrometersHongbin Yu, Guangya Zhou, and Fook Siong ChauMicroelectromechanical Resonators for RF ApplicationsFrederic Nabki, Tomas A. Dusatko, and Mourad N. El-GamalRigid Body Motion Capturing by Means of Wearable Inertial and Magnetic MEMS Sensor Assembly—From Reconstitution of the Posture toward Dead Reckoning: An Application in Bio-LoggingHassen Fourati, Noureddine Manamanni, Lissan Afilal, and Yves HandrichRadio-Controlled Wireless MEMS Actuators and ApplicationsMohamed Sultan Mohamed Ali and Kenichi TakahataAdvanced MEMS Technologies for Tactile Sensing and ActuationM. Amato, Massimo De Vittorio, and S. PetroniMEMS-Based Micro Hot-Plate DevicesJürgen Hildenbrand, Andreas Greiner, and Jan G. KorvinkA Wireless Sensor Networks Enabled Inertial SensorYao-Chiang KanPassive Radio-Frequency Acoustic Sensors and Systems for Wired and Wireless ApplicationsSylvain Ballandras, Gilles Martin, Jean-Michel Friedt, Victor Plessky, Virginie Blondeau-Pâtissier, William Daniau, Thomas Baron, Luc Chommeloux, Stéphane Tourette, Jean-François Leguen, Bruno François, Christophe Droit, Meddy Vanotti, Marc Lamothe, David Rabus, Nicolas Chrétien, and Emile CarryIndex

Vikas Choudhary is currently a senior manager of MEMS and Sensor Technology Group at Analog Devices, where he is involved in design and management of products for Inertial MEMS. He also manages a team of engineers involved in the design of high-performance precision analog-to-digital converters. Vikas has more than 18 years of experience in the semiconductor industry, including as the architect and lead designer for several RFIC subsystems such as 802.16e and 802.11n. He has held various management and design positions at PMC-Sierra, Inc., Texas Instruments, and STMicroelectronics. He has three issued patents. His current research interests are in the field of applied signal processing for high-performance analog circuits and systems. Krzysztof (Kris) Iniewski manages R&D at Redlen Technologies, Inc., a startup company in Vancouver, Canada. He is also the president of CMOS Emerging Technologies Research Inc., an organization of high-tech events covering communications, microsystems, optoelectronics, and sensors. Dr. Iniewski has held numerous faculty and management positions at the University of Toronto, University of Alberta, Simon Fraser University, and PMC-Sierra, Inc. He has published more than 100 research papers in international journals and conferences. He holds 18 international patents granted in the United States, Canada, France, Germany, and Japan. He is a frequent invited speaker, has consulted for multiple organizations internationally, and has written and edited several books.