Handbook of Surface and Nanometrology, Second Edition

Since the publication of the first edition, miniaturization and nanotechnology have become inextricably linked to traditional surface geometry and metrology. This interdependence of scales has had profound practical implications. Updated and expanded to reflect many new developments, Handbook of Surface and Nanometrology, Second Edition determines how the reduction in scale of size from macro to nano has affected all aspects of surface use and measurement. The book discusses how this shift has extended through characterization, standardization, manufacture, and performance. With nanotechnology now permeating the text, this edition covers new methods of production and measurement as well as new performance requirements. Described as the father of digital metrology by the American Society for Precision Engineering, author David J. Whitehouse explores the range of surface size scales—macro, micro, nano, atomic, and combinations of these. He examines traditional, structured, patterned, and free-form surfaces, emphasizing the growing need to understand the behavior of multiple surfaces. Still the definitive reference in the field, the second edition of this handbook continues to provide in-depth, extensive coverage of the engineering, physics, materials, mathematics, and computing involved in surface metrology and nanometrology. Nothing concerning current surface geometry escapes inclusion or scrutiny in this book.

Introduction—Surface and NanometrologyGeneralSurface MetrologyBackground to Surface MetrologyNanometrologyBook Structure CharacterizationThe Nature of SurfacesSurface Geometry Assessment and ParametersCharacterizationWavinessErrors of FormCharacterization of Structured and Free Form SurfacesCharacterization of Defects on the SurfaceDiscussion Processing, Operations, and SimulationsDigital MethodsDiscrete (Digital) Properties of Random SurfacesDigital Form of Statistical Analysis ParametersDigital Estimation of References for Surface MetrologyAlgorithms and Mathematical TechniquesBasic Concepts in Linear ProgrammingFourier Transforms and the Fast Fourier TransformTransformations in Surface MetrologySpace–Frequency FunctionsSurface GenerationAtomistic Considerations and SimulationsSummary Measurement TechniquesBackgroundMeasurement Systems Stylus—MicroMeasuring Instruments Stylus—Nano/Atomic ScaleOptical TechniquesCapacitance and Other TechniquesElectron Microscopy, Photon Microscopy, Raman SpectrometryComparison of Techniques—General SummarySome Design Considerations Standardization-Traceability-UncertaintyIntroductionNature of ErrorsBasic Error Theory Propagation of ErrorsStatistical Tests for Surface MetrologyUncertainty in Instruments—Calibration in GeneralThe Calibration of Stylus and Other InstrumentsCalibration of Form InstrumentsVariability of Surface ParametersGps System—International and National StandardsSpecification for CAD and on DrawingsSummary Surfaces and ManufactureIntroductionManufacturing ProcessesCuttingAbrasive ProcessesUnconventional ProcessesForming ProcessesEffect of Scale of Size in Manufacture: Macro to Nano to Atomic ProcessesStructured Surface ManufactureManufacture of Free-Form SurfacesMathematical Processing of Manufacture-Finite Element Analysis (Fe), Md, NurbsThe Subsurface and the InterfaceSurface IntegritySurface Geometry—A Fingerprint of ManufactureSurface Finish Effects in Manufacture of Microchip Electronic ComponentsDiscussion and Conclusions Surface Geometry and Its Importance in FunctionIntroductionTwo-Body Interaction—The Static Situation Macro to Nanoscale, Contact, Adhesion CorrosionTwo-Body Interactions—Dynamic Behavior Macro to Nanoscale, Friction, Wear, LubricationOne-Body Interactions— Optical Scatter, DiffractionSystem Function Multi-Surfaces AssemblyDiscussionConclusions Surface Geometry, Scale of Size Effects, NanometrologyIntroductionEffect of Scale of Size on Surface GeometryScale of Size, Surface Geometry, and FunctionScale of Size and Surfaces in ManufactureNano InstrumentationOperation and Design ConsiderationsStandards, Traceability, and Uncertainty at the NanoscaleMeasurement of Typical NanofeaturesMeasuring Length to Nanoscale with Interferometers and Other DevicesNano Geometry in Macro SituationsDiscussion and Conclusions General CommentsIntroductionCharacterizationProcessing, Operations, and SimulationsMeasurement TechniquesTraceability Standardization UncertaintySurfaces and ManufactureSurface Geometry and PerformanceNanometrologyOverview Glossary Index References appear at the end of each chapter.

Regarded as one of the world’s top authorities on surface and nanometrology, David J. Whitehouse is professor emeritus of engineering science at the University of Warwick, where he was chief scientist in the School of Engineering. He has also been a consultant to numerous organizations, such as Rolls Royce, Taylor Hobson, Kodak, Unilever, General Motors, Caterpillar, 3M, Toshiba Japan, UBM Germany, and the Atomic Weapons Research Establishment. He has published 5 books and more than 250 technical papers, holds 23 patents, and was founding editor of the first peer-reviewed international journal on nanoscale science and technology, Nanotechnology. Professor Whitehouse has been a recipient of many awards, including the Lifetime Achievement Award from the American Society for Precision Engineering, the Champion of Metrology award from the National Physical Laboratory, and the Commemorative Medallion of the Mendeleev Institute of Metrology.