Electromechanics and MEMS

Offering a consistent, systematic approach to capacitive, piezoelectric and magnetic MEMS, from basic electromechanical transducers to high-level models for sensors and actuators, this comprehensive textbook equips graduate and senior-level undergraduate students with all the resources necessary to design and develop practical, system-level MEMS models. The concise yet thorough treatment of the underlying principles of electromechanical transduction provides a solid theoretical framework for this development, with each new topic related back to the core concepts. Repeated references to the shared commonalities of all MEMS encourage students to develop a systems-based design perspective. Extensive use is made of easy-to-interpret electrical and mechanical analogs, such as electrical circuits, electromechanical two-port models and the cascade paradigm. Each chapter features worked examples and numerous problems, all designed to test and extend students' understanding of the key principles.

1. Introduction; 2. Circuit-based modeling; 3. Capacitive lumped parameter electromechanics; 4. Small-signal capacitive electromechanical systems; 5. Capacitive sensing and resonant drive circuits; 6. Distributed 1-D and 2-D electromechanical structures; 7. Practical MEMS devices; 8. Electromechanics of piezoelectric elements; 9. Electromechanics of magnetic MEMS devices; A. Review of quasistatic electromagnetics; B. Review of mechanical resonators; C. Micromachining; D. A brief review of solid mechanics.

Thomas B. Jones is Professor of Electrical Engineering at the University of Rochester. An experienced educator involved in teaching for over 40 years, his research has focused on electric field-mediated manipulation and transport of particles and liquids. He holds a PhD from the Massachusetts Institute of Technology, is the author of Electromechanics of Particles (Cambridge University Press, 1995) and is a Fellow of the IEEE.
Nenad G. Nenadic is a Research Associate Professor at the Rochester Institute of Technology. His career, spanning both industry and academia, has involved him in many aspects of MEMS, including design and analysis, system-level simulation, test development and marketing. He holds a PhD from the University of Rochester, where he assisted in the teaching of graduate-level MEMS courses.